The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2019

Filed:

Apr. 06, 2015
Applicant:

Seagate Technology Llc, Cupertino, CA (US);

Inventors:

Joachim Ahner, Livermore, CA (US);

David Tung, Livermore, CA (US);

Assignee:

Seagate Technology LLC, Cupertino, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G11B 20/18 (2006.01); G01N 21/88 (2006.01); G01N 21/21 (2006.01); G01N 21/55 (2014.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
G11B 20/1816 (2013.01); G01N 21/21 (2013.01); G01N 21/55 (2013.01); G01N 21/8806 (2013.01); G01N 21/95 (2013.01); G01B 9/02 (2013.01); G01B 2290/70 (2013.01); G01N 21/9501 (2013.01); G01N 21/9506 (2013.01); G01N 2021/8848 (2013.01); G01N 2201/06113 (2013.01);
Abstract

Provided herein are apparatus and methods for inspecting articles for features using interference in light reflected from the articles. The interference may be used to detect, distinguish, and/or map features of articles, which features may include, but are not limited to, surface defects. In at least one embodiment, an apparatus and method includes conveying parallel light along a primary axis through a telecentric lens and a light-splitting device, respectively; illuminating a majority of a surface of an article with the parallel light; conveying reflected light from the surface of the article along the primary axis back through the light-splitting device and the telecentric lens, respectively; and recording interference resulting from a combination of light comprising at least the reflected light from the surface of the article.


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