The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2019

Filed:

May. 17, 2017
Applicants:

Tsinghua University, Beijing, CN;

Hon Hai Precision Industry Co., Ltd., New Taipei, TW;

Inventors:

Jiang-Tao Wang, Beijing, CN;

Xiang Jin, Beijing, CN;

Peng Liu, Beijing, CN;

Yang Wei, Beijing, CN;

Kai-Li Jiang, Beijing, CN;

Shou-Shan Fan, Beijing, CN;

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); G01N 27/02 (2006.01); H01L 21/66 (2006.01); C23C 16/26 (2006.01); C23C 16/46 (2006.01); G01N 27/22 (2006.01); G01R 15/12 (2006.01); G01R 29/24 (2006.01); G01R 31/02 (2006.01); C23C 16/52 (2006.01); G01N 27/04 (2006.01); C01B 32/158 (2017.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G01N 27/02 (2013.01); C01B 32/158 (2017.08); C23C 16/26 (2013.01); C23C 16/46 (2013.01); C23C 16/52 (2013.01); G01N 27/041 (2013.01); G01N 27/226 (2013.01); G01R 15/12 (2013.01); G01R 29/24 (2013.01); G01R 31/025 (2013.01); G01R 31/026 (2013.01); H01L 22/14 (2013.01); H01L 51/0002 (2013.01); H01L 51/0031 (2013.01); H01L 51/0048 (2013.01); B82Y 40/00 (2013.01); C01B 2202/22 (2013.01);
Abstract

A device for in-situ measuring electrical properties of a carbon nanotube array comprises a chamber, a substrate, a first electrode, a connecting wire, a second electrode, a support structure, and a measuring meter. The substrate, the first electrode, the connecting wire, the second electrode, and the support structure are located inside of the chamber. The measuring meter is located outside of the chamber, and the measuring meter is electrically connected to the first electrode and the second electrode. The first electrode defines a cavity, and the substrate is suspended in the cavity by interaction of the support structure, the second electrode, and the connecting wire.


Find Patent Forward Citations

Loading…