The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2019
Filed:
Nov. 30, 2016
Texas Instruments Incorporated, Dallas, TX (US);
Mohammad Hadi Motieian Najar, Santa Clara, CA (US);
Ira Oaktree Wygant, Palo Alto, CA (US);
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Abstract
Methods and apparatus to calibrate micro-electromechanical systems are disclosed. An example pressure sensor calibration apparatus includes a mechanical lift to move a pressure sensor between a first height, a second height, and a third height; one or more sensors to measure first pressure and capacitance values at the first height, second pressure and capacitance values at the second height, and third pressure and capacitance values obtained at the third height; and a calibrator to determine calibration coefficient values to calibrate the pressure sensor based on the first pressure and capacitance values obtained at the first height, the second pressure and capacitance values at the second height, and the third pressure and capacitance values obtained at the third height.