The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2019
Filed:
Dec. 13, 2013
Applicant:
Hitachi Automotive Systems, Ltd., Hitachinaka-shi, Ibaraki, JP;
Inventors:
Assignee:
Hitachi Automotive Systems, Ltd., Hitachinaka-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 1/684 (2006.01); G01F 1/69 (2006.01); G01F 15/02 (2006.01); H01L 29/84 (2006.01); H01L 29/04 (2006.01);
U.S. Cl.
CPC ...
G01F 1/69 (2013.01); G01F 1/684 (2013.01); G01F 1/6842 (2013.01); G01F 15/022 (2013.01); H01L 29/84 (2013.01); H01L 29/045 (2013.01);
Abstract
In order to provide a thermal flow sensor having high measurement accuracy, the thermal type air flow sensor includes a flow detecting unit, a sub passage on which the flow detecting unit is disposed, and an LSI to which a signal obtained by the flow detecting unit is input and which outputs a signal to the outside. A side wall of the sub passage is disposed between the flow detecting unit and the LSI, or on the LSI. A diffusion resistor provided inside the LSI has its longitudinal direction in parallel with a <100> orientation of single-crystal Si.