The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2019
Filed:
Sep. 12, 2016
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventor:
Makoto Furuhata, Matsumoto, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01C 19/574 (2012.01);
U.S. Cl.
CPC ...
G01C 19/574 (2013.01);
Abstract
A physical quantity sensor includes a substrate, a detection flap plate which is disposed facing the substrate, a mass portion which supports the detection flap plate, a beam portion which connects the detection flap plate and the mass portion, and a first regulating portion which is positioned between the detection flap plate and the mass portion and regulates displacement of the detection flap plate in an in-plane direction. In addition, the first regulating portion is provided in a corner portion of the detection flap plate which is formed in a rectangular shape.