The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2019
Filed:
Nov. 18, 2016
Applicants:
Kris Vossough, Palo Alto, CA (US);
Farhang Yazdani, San Jose, CA (US);
Inventors:
Kris Vossough, Palo Alto, CA (US);
Farhang Yazdani, San Jose, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01D 21/02 (2006.01); G01D 5/353 (2006.01); G01L 11/02 (2006.01); G01P 15/08 (2006.01); G01P 15/093 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02051 (2013.01); G01D 5/35312 (2013.01); G01D 21/02 (2013.01); G01L 11/02 (2013.01); G01P 15/0802 (2013.01); G01P 15/093 (2013.01); B81B 2201/0235 (2013.01);
Abstract
This invention describes the structure and function of an integrated multi-sensing system. Integrated systems described herein may be configured to form a microphone, pressure sensor, gas sensor or accelerometer. The system uses Fabry-Perot Interferometer in conjunction with beam collimator, beam splitter, optical waveguide and a photodetector integrated. It also describes a configurable method for tuning the integrated system to specific resonance frequency using electrostatic actuators.