The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2019

Filed:

Jan. 19, 2017
Applicant:

Microjet Technology Co., Ltd., Hsinchu, TW;

Inventors:

Shih-Chang Chen, Hsinchu, TW;

Chi-Feng Huang, Hsinchu, TW;

Yung-Lung Han, Hsinchu, TW;

Jia-Yu Liao, Hsinchu, TW;

Shou-Hung Chen, Hsinchu, TW;

Che-Wei Huang, Hsinchu, TW;

Hung-Hsin Liao, Hsinchu, TW;

Chao-Chih Chen, Hsinchu, TW;

Jheng-Wei Chen, Hsinchu, TW;

Ying-Lun Chang, Hsinchu, TW;

Chia-Hao Chang, Hsinchu, TW;

Wei-Ming Lee, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 43/04 (2006.01); F04B 45/047 (2006.01); F04B 53/10 (2006.01); H01L 41/053 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
F04B 43/046 (2013.01); F04B 45/047 (2013.01); F04B 53/10 (2013.01); H01L 41/053 (2013.01); H01L 41/09 (2013.01);
Abstract

A miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The gas inlet plate includes at least one inlet, at least one convergence channel and a central cavity. A convergence chamber is defined by the central cavity. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric ceramic plate. A gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. When the piezoelectric actuator is driven and after the gas is fed into the miniature fluid control device through the inlet of the gas inlet plate, the gas is sequentially converged to the central cavity through the convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, transferred downwardly through the piezoelectric actuator, and exited from the miniature fluid control device.


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