The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2019

Filed:

Aug. 01, 2016
Applicant:

Boe Technology Group Co., Ltd., Beijing, CN;

Inventors:

Wenbin Jia, Beijing, CN;

Rui Peng, Beijing, CN;

Xinxin Wang, Beijing, CN;

Feifei Zhu, Beijing, CN;

Xinwei Gao, Beijing, CN;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/52 (2006.01); C23C 14/54 (2006.01); C23C 14/24 (2006.01); H01L 41/04 (2006.01); G01B 17/02 (2006.01); G01B 11/06 (2006.01);
U.S. Cl.
CPC ...
C23C 14/546 (2013.01); C23C 14/24 (2013.01); H01L 41/04 (2013.01); C23C 14/542 (2013.01); C23C 14/545 (2013.01); G01B 11/0683 (2013.01); G01B 17/025 (2013.01);
Abstract

Embodiments of the present invention disclose a detection device for detecting a thickness of a vacuum-evaporated film and a vacuum evaporation apparatus, thereby solving, for example, a problem that a conventional detection device results in excessively high production cost due to frequent replacement of a crystal plate. The detection device includes: a crystal plate, a detection structure provided with an opening corresponding to the crystal plate such that evaporated molecules or atoms are deposited on the crystal plate through the opening; and a filter disposed between the opening and the crystal plate.


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