The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 13, 2019

Filed:

Aug. 31, 2015
Applicants:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe-shi, Hyogo, JP;

Kawasaki Robotics (Usa), Inc., Wixom, MI (US);

Inventors:

Mark Tang, Walnut Creek, CA (US);

Eric Chan, San Francisco, CA (US);

Shigeki Ono, Campbell, CA (US);

Shinya Kitano, San Jose, CA (US);

Ming Zeng, San Jose, CA (US);

Hirohiko Goto, Akashi, JP;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 9/04 (2006.01); H01L 21/687 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68707 (2013.01); B25J 9/042 (2013.01); H01L 21/67742 (2013.01); H01L 21/67766 (2013.01); H01L 21/67778 (2013.01); H01L 21/67781 (2013.01);
Abstract

A control unit of a substrate conveying robot makes a robot arm and a substrate holding device execute a blade member advancing operation, a substrate receiving operation, and a substrate placing operation. The substrate holding device is configured to be capable of being switched between a first working state that a pair of blade members are arranged in the vertical direction and a second working state that a pair of blade members are arranged in a position out of the vertical direction and a single blade member can be advanced into a substrate placing structure.


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