The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2019
Filed:
Mar. 20, 2018
Tescan Brno S.r.o., Brno, CZ;
Tescan Tempe, Llc., Tempe, AZ (US);
TESCAN BRNO, S.R.O., Brno, CZ;
TESCAN TEMPE, LLC, Tempe, AZ (US);
Abstract
The object of the present invention provides a scanning transmission electron microscope with the ability to formed at least one diffraction pattern. The scanning electron microscope comprises an electron source, which is configured to provide primary electron beam, a condenser lens system, an objective electromagnetic system, a projection lens system and a detection system, in addition, the objective electromagnetic lens consists of an upper pole piece and a lower pole piece, wherein each pole piece comprises a pole piece face, which is a flat surface oriented towards a sample plane. A salient feature of the present invention is to form at least one diffraction pattern located in the distance from the lower pole piece face outside the pole piece gap, wherein the pole piece gap is the space between the upper pole piece face and the lower pole piece face.