The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 13, 2019

Filed:

Dec. 30, 2015
Applicant:

Stmicroelectronics (Rousset) Sas, Rousset, FR;

Inventors:

Abderrezak Marzaki, Marseilles, FR;

Yoann Goasduff, Fuveau, FR;

Virginie Bidal, Fuveau, FR;

Pascal Fornara, Pourrières, FR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01H 9/02 (2006.01); H01H 37/42 (2006.01); H01H 61/013 (2006.01); G01V 7/04 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); H01L 49/02 (2006.01); H01H 37/04 (2006.01); H01H 37/32 (2006.01); H01L 21/3213 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
G01V 7/04 (2013.01); B81B 3/001 (2013.01); B81C 1/00111 (2013.01); H01H 37/04 (2013.01); H01H 37/32 (2013.01); H01L 21/32139 (2013.01); H01L 28/82 (2013.01); H01L 29/4238 (2013.01); B81B 2201/018 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0242 (2013.01); B81B 2203/0361 (2013.01); B81B 2203/04 (2013.01); H01H 9/02 (2013.01); H01H 37/42 (2013.01); H01H 61/013 (2013.01); H01L 28/88 (2013.01);
Abstract

A method for producing an integrated circuit pointed element is disclosed. An element has a projection with a concave part directing its concavity towards the element. The element includes a first etchable material. A zone is formed around the concave part of the element. The zone includes a second material that is less rapidly etchable than the first material for a particular etchant. The first material and the second material are etched with the particular etchant to form an open crater in the concave part and thus to form a pointed region of the element.


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