The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 13, 2019

Filed:

Feb. 17, 2016
Applicants:

Akita University, Akita-shi, Akita, JP;

Daikin Industries, Ltd., Osaka-Shi, Osaka, JP;

Inventors:

Kazuya Matsumoto, Akita, JP;

Mitsutoshi Jikei, Akita, JP;

Kunio Nishi, Akita, JP;

Tsuyoshi Noguchi, Osaka, JP;

Fumihiro Kamiya, Osaka, JP;

Assignees:

Akita University, Akita, JP;

DAIKIN INDUSTRIES, LTD., Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08K 5/5419 (2006.01); C08L 27/12 (2006.01); C08L 77/00 (2006.01); C08L 83/10 (2006.01); C08G 69/12 (2006.01); C08K 5/00 (2006.01); C08K 5/5415 (2006.01);
U.S. Cl.
CPC ...
C08K 5/5419 (2013.01); C08G 69/12 (2013.01); C08K 5/0025 (2013.01); C08K 5/5415 (2013.01); C08L 27/12 (2013.01); C08L 77/00 (2013.01); C08L 83/10 (2013.01);
Abstract

The invention provides a composition capable of providing a molded article that has excellent heat resistance and a small weight change against both fluorine plasma exposure and oxygen plasma exposure during a semiconductor manufacturing step. The composition contains a fluorine-containing polymer and a cage silsesquioxane having a specific structure.


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