The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 13, 2019

Filed:

Sep. 03, 2010
Applicants:

Akira Kamabuchi, Kobe, JP;

Yuko Yamashita, Toyonaka, JP;

Inventors:

Akira Kamabuchi, Kobe, JP;

Yuko Yamashita, Toyonaka, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07C 61/135 (2006.01); G03F 7/004 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
C07C 61/135 (2013.01); G03F 7/0045 (2013.01); G03F 7/0397 (2013.01); G03F 7/0046 (2013.01);
Abstract

A photoresist composition comprising a resin which comprises a structural unit derived from a compound having an acid-labile group and which is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, an acid generator and a compound represented by the formula (I'): wherein R, R, Rand Rindependently each represent a C1-C8 alkyl group, and Arepresents a C3-C36 divalent saturated cyclic hydrocarbon group which can contain one or more heteroatoms and which have one or more substituents or a C6-C20 divalent aromatic hydrocarbon group which can contain one or more heteroatoms and which have one or more substituents.


Find Patent Forward Citations

Loading…