The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 06, 2019

Filed:

Sep. 13, 2016
Applicant:

Mitsubishi Electric Corporation, Chiyoda-ku, JP;

Inventors:

Takaaki Tominaga, Tokyo, JP;

Shiro Hino, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/06 (2006.01); H01L 21/04 (2006.01); H01L 29/10 (2006.01); H01L 29/16 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7802 (2013.01); H01L 21/0465 (2013.01); H01L 29/06 (2013.01); H01L 29/0615 (2013.01); H01L 29/1037 (2013.01); H01L 29/1608 (2013.01); H01L 29/66068 (2013.01);
Abstract

A silicon carbide semiconductor device includes: a pair of first well regions separated by distance Win surface layer portions of a silicon carbide drift layer and having p-type impurity concentration higher than n-type impurity concentration of the silicon carbide drift layer; a pair of second well regions provided adjacent to bottom faces of the first well regions, separated by distance Wlarger than the distance Wby 0.8 μm or more, and having p-type impurity concentration higher than n-type impurity concentration of the silicon carbide drift layer from 1.1 times to 4.2 times lower than the first well regions; and a highly concentrated JFET region provided between the pair of first well regions and between the pair of second well regions and having n-type impurity concentration higher than that of the silicon carbide drift layer and lower than p-type impurity concentration or the second well regions.


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