logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10373860 B1

PDFFull Text
Date of Patent:
Aug. 06, 2019

Filed:

Jun. 30, 2015

Batch processing apparatus

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Mukund Sundararajan, Bangalore, IN;

Ananthkrishna Jupudi, Singapore, SG;

Manjunatha Koppa, Karnataka, IN;

Saket Rathi, Rajasthan, IN;

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorneys:

Moser Taboada

Alan Taboada

Primary Examiner:

Sang Y Paik

Int. Cl.
CPC ...
F26B 3/30 (2006.01); F26B 13/10 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68785 (2013.01); H01L 21/68742 (2013.01); H01L 21/68764 (2013.01);
Abstract

Embodiments of batch processing apparatus and collapsible substrate support are provided herein. In some embodiments, a collapsible substrate support includes a base linearly moveable between a first position and a second position; and a first plurality of substrate support elements coupled to the base and including a lowermost substrate support element disposed in a fixed position with respect to the base and an uppermost substrate support element disposed above the lowermost substrate support element, wherein the uppermost substrate support element is linearly movable between a first position nearer to the lowermost substrate support element and a second position further from the lowermost substrate support element.

Find Patent Forward Citations

Sundararajan, Mukund. (2019). Batch processing apparatus (U.S. Patent No. 10373860). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10373860

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…