The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2019
Filed:
Sep. 11, 2013
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Friedrich Kroener, Villach, AT;
Ingo Muri, Villach, AT;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3063 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3063 (2013.01); H01L 21/67075 (2013.01); H01L 21/67086 (2013.01);
Abstract
A wafer contacting device may include: a receiving region configured to receive a wafer; and an elastically deformable carrier disposed in the receiving region and including an electrically conductive surface region.