The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 06, 2019

Filed:

Aug. 12, 2016
Applicant:

Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v., Munich, DE;

Inventors:

Thomas Lisec, Itzehoe, DE;

Fabian Stoppel, Itzehoe, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); H01H 57/00 (2006.01); H01H 59/00 (2006.01); F16K 99/00 (2006.01); H01H 47/00 (2006.01); H01H 49/00 (2006.01);
U.S. Cl.
CPC ...
H01H 59/0009 (2013.01); F16K 99/0048 (2013.01); H01H 47/00 (2013.01); H01H 49/00 (2013.01); H01H 57/00 (2013.01); H01L 41/0926 (2013.01); H01H 2057/006 (2013.01); H01L 41/094 (2013.01);
Abstract

A micro-electro-mechanical system includes a deflectable actuator plate and an abutment area. An integral piezoelectric functional layer of the deflectable actuator plate is configured across an area Aof the actuator plate. The deflectable actuator plate is configured to effect a hollow warp in at least a controlled or non-controlled state, wherein the abutment area is disposed facing a hollow side of the deflectable actuator plate defined by the hollow warp. The deflectable actuator plate is configured to provide, in the state in which the same effects the hollow warp, mechanical contact between the deflectable actuator plate and the abutment area. In the other state, the deflectable actuator plate is disposed spaced apart from the abutment area.


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