The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2019
Filed:
Aug. 31, 2017
Applicants:
Kabushiki Kaisha Toshiba, Tokyo, JP;
The University of Tokyo, Tokyo, JP;
Inventors:
Yongfang Li, Kanagawa, JP;
Hiroyuki Fujita, Tokyo, JP;
Assignees:
Kabushiki Kaisha Toshiba, Tokyo, JP;
The University of Tokyo, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); G03F 7/0015 (2013.01); H01L 21/306 (2013.01);
Abstract
A edge electrode mold according to an embodiment includes a base having a first main surface and one or more protruding structures disposed on the first main surface. The protruding structures include a protrusion projecting from the first main surface of the base, an edge electrode disposed at the protrusion, and an electrolytic hydrophobic film having electrolytic property and hydrophobicity disposed on the upper end surface of a protruding shape including the protrusion and the edge electrode.