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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10372034 B1

PDFFull Text
Date of Patent:
Aug. 06, 2019

Filed:

Nov. 21, 2016

Imprint apparatus, imprint method, and method for manufacturing article

Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Kazuki Nakagawa, Utsunomiya, JP;

Kazuhiro Sato, Utsunomiya, JP;

Tsutomu Terao, Utsunomiya, JP;

Assignee:

Canon Kabushiki Kaisha, Tokyo, JP;

Attorney:

Canon U.S.A., Inc. I.P. Division

Primary Examiner:

Joseph S Del Sole

Assistant Examiner:

Lawrence D Hohenbrink, Jr

Int. Cl.
CPC ...
B29C 59/16 (2006.01); G03F 7/00 (2006.01); B29K 105/24 (2006.01); B29L 31/34 (2006.01); B29C 59/02 (2006.01); B29C 35/08 (2006.01); B29C 35/02 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 35/02 (2013.01); B29C 35/0288 (2013.01); B29C 35/08 (2013.01); B29C 35/0805 (2013.01); B29C 35/0888 (2013.01); B29C 59/02 (2013.01); B29C 59/022 (2013.01); B29C 59/026 (2013.01); B29C 59/16 (2013.01); B29C 2035/0827 (2013.01); B29C 2059/023 (2013.01); B29K 2105/24 (2013.01); B29L 2031/34 (2013.01); G03F 7/20 (2013.01); G03F 7/2002 (2013.01); G03F 7/2012 (2013.01); G03F 7/70558 (2013.01); G03F 7/70608 (2013.01); G03F 2007/2067 (2013.01);
Abstract

An imprint apparatus for forming a pattern of an imprint material on a substrate using a mold includes a heating unit, a generation unit, and a measurement unit. The heating unit irradiates a region to be processed on the substrate with light to heat the region to be processed. The generation unit generates irradiation amount distribution data, which indicates an irradiation amount distribution of light with which the heating unit is to irradiate the region to be processed. The measurement unit measures information about absorption of the light by the region to be processed. The generation unit generates the irradiation amount distribution data by correcting, using a result of measurement by the measurement unit, temporary irradiation amount distribution data temporarily generated based on a shape of the region to be processed taken before the region to be processed is heated by the heating unit.

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