The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 06, 2019

Filed:

Mar. 29, 2017
Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventor:

Takayuki Naono, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 26/12 (2006.01); G02B 26/10 (2006.01); H01L 41/09 (2006.01); H01L 41/18 (2006.01); H01L 41/04 (2006.01); H01L 41/113 (2006.01); H01L 41/187 (2006.01);
U.S. Cl.
CPC ...
G02B 26/105 (2013.01); G02B 26/08 (2013.01); G02B 26/0858 (2013.01); G02B 26/10 (2013.01); H01L 41/042 (2013.01); H01L 41/0933 (2013.01); H01L 41/0946 (2013.01); H01L 41/0993 (2013.01); H01L 41/1132 (2013.01); H01L 41/18 (2013.01); H01L 41/1876 (2013.01);
Abstract

A piezoelectric actuator part which generates a driving force to rotate a mirror part about a rotation axis includes a first actuator part and a second actuator part having a both-end supported beam structure in which base end parts on both sides in an axial direction of the rotation axis are fixed. Upper electrodes and lower electrodes of the first actuator part and the second actuator part are divided to correspond to a stress distribution of principal stresses in a piezoelectric body during resonance mode vibration, a piezoelectric portion corresponding to positions of a first piezoelectric conversion part and third piezoelectric conversion parts and a piezoelectric portion corresponding to positions of second piezoelectric conversion parts and a fourth piezoelectric conversion part generate stresses in opposite directions.


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