The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2019
Filed:
Mar. 07, 2013
Nikon Corporation, Tokyo, JP;
Christopher Margeson, Mountain View, CA (US);
Travis Bow, East Palo Alto, CA (US);
NIKON RESEARCH CORPORATION OF AMERICA, Belmont, CA (US);
Abstract
A mirror assembly () for directing a beam () includes a base (), and an optical element () that includes (i) a mirror (), (ii) a stage () that retains the mirror (), (iii) a mover assembly () that moves the stage () and the mirror () relative to the base (), and (v) a thermally conductive medium () that is positioned between the stage () and the base () to transfer heat between the stage () and the base (). The thermally conductive medium () has a thermal conductivity that is greater than the thermal conductivity of air. The thermally conductive medium () can include an ionic fluid or a liquid metal.