The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 06, 2019

Filed:

Aug. 01, 2014
Applicant:

Commissariat À L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Jordi Veirman, Poisy, FR;

Sébastien Dubois, Scionzier, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/08 (2006.01); G01N 27/04 (2006.01); G01N 21/95 (2006.01); H01L 21/66 (2006.01); G01N 21/3504 (2014.01); G01R 31/26 (2014.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/041 (2013.01); G01N 21/3504 (2013.01); G01N 21/9501 (2013.01); G01R 31/2601 (2013.01); H01L 22/12 (2013.01); H01L 22/14 (2013.01); H01L 22/20 (2013.01); G01N 2033/0095 (2013.01);
Abstract

A method for determining the original position of a wafer in an ingot made from semiconductor material comprises the following steps: measuring the interstitial oxygen concentration in an area of the wafer; measuring the concentration of thermal donors formed in said area of the wafer during a previous solidification of the ingot; determining the effective time of a thermal donor formation anneal undergone by the wafer when solidification of the ingot took place, from the thermal donor concentration and the interstitial oxygen concentration; and determining the original position of the wafer in the ingot from the effective time.


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