The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2019
Filed:
Mar. 22, 2017
Honeywell International Inc., Morris Plains, NJ (US);
Burgess R. Johnson, Bloomington, MN (US);
Honeywell International Inc., Morris Plains, NJ (US);
Abstract
Systems and methods for a four-mass vibrating mems structure are provided. In certain implementations, a MEMS sensor includes four proof masses, wherein each proof mass is driven such that the proof masses oscillate along radial lines extending from the center of the MEMS sensor through the center of the respective proof mass, each proof mass comprising a plurality of drive combs; and a plurality of sense combs. In further embodiments, the MEMS sensor includes at least one substrate having one or more drive electrodes for driving the four proof masses along the radial lines at a drive frequency, wherein a resonant frequency of a sense mode is different from the drive frequency.