The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2019
Filed:
Feb. 22, 2016
Applicant:
Honeywell International Inc., Morris Plains, NJ (US);
Inventors:
Assignee:
Honeywell International Inc., Morris Plains, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); G01L 9/00 (2006.01); B81B 3/00 (2006.01); G01L 7/08 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00158 (2013.01); B81B 3/007 (2013.01); B81B 3/0021 (2013.01); G01L 7/08 (2013.01); G01L 9/0042 (2013.01); G01L 9/0044 (2013.01); G01L 9/0047 (2013.01); G01L 9/0054 (2013.01); G01L 9/0055 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0127 (2013.01); B81C 2201/014 (2013.01); B81C 2201/0198 (2013.01); B81C 2203/0728 (2013.01);
Abstract
A method includes forming a mask that defines a masked area and an unmasked area on a front side of a substrate, and implanting a buried layer corresponding to the unmasked area on the front side of the substrate. The method also includes forming an epitaxial layer having a back side on the front side of the substrate and on a front side of the buried layer, and creating an opening into a back side of the substrate up to a back side of the epitaxial layer and a back side of the one or portions of the buried layer.