The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2019
Filed:
Mar. 27, 2015
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Shigeyoshi Netsu, Joetsu, JP;
Kyoji Oguro, Joetsu, JP;
Takaaki Shimizu, Joetsu, JP;
Yasushi Kurosawa, Joetsu, JP;
Fumitaka Kume, Joetsu, JP;
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Abstract
The present invention provides a technique by which heat can be efficiently recovered from a coolant used to cool a reactor, and contamination with dopant impurities from an inner wall of a reactor when polycrystalline silicon is deposited within the reactor can be reduced to produce high-purity polycrystalline silicon. With the use of hot waterhaving a temperature higher than a standard boiling point as a coolant fed to the reactor, the temperature of the reactor inner wall is kept at a temperature of not more than 370° C. Additionally, the pressure of the hot waterto be recovered is reduced by a pressure control section provided in a coolant tankto generate steam. Thereby, a part of the hot water is taken out as steam to the outside, and reused as a heating source for another application.