The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2019
Filed:
Mar. 24, 2016
Applicants:
Infineon Technologies Ag, Neubiberg, DE;
Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v., Munich, DE;
Inventors:
Stefan Kolb, Unterschleissheim, DE;
Alfons Dehe, Reutlingen, DE;
Jochen Huber, Wolfach, DE;
Franz Jost, Stuttgart, DE;
Horst Theuss, Wenzenbach, DE;
Wilhelm Wiedmeier, Augsburg, DE;
Juergen Woellenstein, Freiburg, DE;
Assignees:
Infineon Technologies AG, Neubiberg, DE;
Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V., Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/17 (2006.01); G01N 29/02 (2006.01); G01N 29/24 (2006.01); G01N 29/30 (2006.01);
U.S. Cl.
CPC ...
G01N 21/1702 (2013.01); G01N 29/022 (2013.01); G01N 29/2418 (2013.01); G01N 29/30 (2013.01); G01N 2021/1704 (2013.01); G01N 2291/0256 (2013.01);
Abstract
Shown is a gas sensor including a sensor element, a measurement chamber and an emitter element. The sensor element has a MEMS membrane which is arranged in a first substrate region. Furthermore, the measurement chamber is embodied to receive a measurement gas.