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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10364498 B1

PDFFull Text
Date of Patent:
Jul. 30, 2019

Filed:

Mar. 10, 2015

Gas supply pipe, and gas treatment equipment

Applicant:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Inventors:

Takahiro Terada, Yokohama, JP;

Takuya Matsuda, Kamakura, JP;

Kaori Deura, Yokohama, JP;

Masayuki Tanaka, Yokohama, JP;

Aya Watase, Tokyo, JP;

Assignee:

KABUSHIKI KAISHA TOSHIBA, Minato-ku, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Jeffrie R Lund

Assistant Examiner:

Stanislav Antolin

Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/458 (2006.01); C30B 25/14 (2006.01); C30B 31/16 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45578 (2013.01); C23C 16/4583 (2013.01); C30B 25/14 (2013.01); C30B 31/16 (2013.01); H01J 37/3244 (2013.01); C23C 16/4584 (2013.01);
Abstract

According to one embodiment, a gas supply pipe has a first gas pipe configured to blow a gas which has flowed from an inflow opening via first gas blow holes arranged along a longitudinal direction, and a second gas pipe provided in parallel with the first gas pipe. The second gas pipe has second gas blow holes arranged along the longitudinal direction, and allows the gas to flow in a direction opposite to the first gas pipe.

Find Patent Forward Citations

Terada, Takahiro. (2019). Gas supply pipe, and gas treatment equipment (U.S. Patent No. 10364498). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10364498

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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