The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2019
Filed:
Mar. 10, 2015
Applicant:
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Inventors:
Takahiro Terada, Yokohama, JP;
Takuya Matsuda, Kamakura, JP;
Kaori Deura, Yokohama, JP;
Masayuki Tanaka, Yokohama, JP;
Aya Watase, Tokyo, JP;
Assignee:
KABUSHIKI KAISHA TOSHIBA, Minato-ku, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/458 (2006.01); C30B 25/14 (2006.01); C30B 31/16 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45578 (2013.01); C23C 16/4583 (2013.01); C30B 25/14 (2013.01); C30B 31/16 (2013.01); H01J 37/3244 (2013.01); C23C 16/4584 (2013.01);
Abstract
According to one embodiment, a gas supply pipe has a first gas pipe configured to blow a gas which has flowed from an inflow opening via first gas blow holes arranged along a longitudinal direction, and a second gas pipe provided in parallel with the first gas pipe. The second gas pipe has second gas blow holes arranged along the longitudinal direction, and allows the gas to flow in a direction opposite to the first gas pipe.