The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2019
Filed:
Oct. 10, 2016
Eugene Technology Co., Ltd., Yongin-Si, Gyeonggi-Do, KR;
Cha Young Yoo, Suwon-Si, KR;
Sung Tae Je, Yongin-Si, KR;
Kyu Jin Choi, Yongin-Si, KR;
Ja Dae Ku, Suwon-Si, KR;
Jun Kim, Yongin-Si, KR;
Bong Ju Jung, Hwaseong-Si, KR;
Kyung Seok Park, Hwaseong-Si, KR;
Yong Ki Kim, Osan-Si, KR;
Jae Woo Kim, Bucheon-Si, KR;
EUGENE TECHNOLOGY CO., LTD., , KR;
Abstract
The present disclosure relates to a substrate processing apparatus, and more particularly, a substrate processing apparatus that is capable of improving process uniformity on an entire surface of a substrate. The substrate processing apparatus includes a substrate boat in which a substrate is loaded, a reaction tube in which a processing process for the substrate loaded in the substrate boat is performed, a gas supply unit configured to supply a process gas into the reaction tube through an injection nozzle disposed on one side of the reaction tube, a heating unit including a plurality of vertical heating parts, which are disposed along a circumference of the reaction tube outside the reaction tube and configured to divide the circumference to the reaction tube into a plurality of portions so as to independently heat each of the divided portions of the reaction tube, and a control unit configured to control the heating unit.