The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2019
Filed:
Aug. 08, 2017
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Hak Joo Lee, Incheon, KR;
Dae Youn Kim, Daejeon, KR;
Seung Wook Kim, Gyeongsangnam-do, KR;
Jin Seok Park, Gyeonggi-do, KR;
Jae Hyun Kim, Gyeongsangbuk-do, KR;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/34 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4412 (2013.01); C23C 16/345 (2013.01); C23C 16/455 (2013.01); C23C 16/4554 (2013.01); C23C 16/45544 (2013.01); C23C 16/45561 (2013.01); H01J 37/32449 (2013.01); H01J 37/32513 (2013.01); H01J 37/32834 (2013.01);
Abstract
An exhaust apparatus using a gas curtain instead of a mechanical opening/closing structure is provided. The exhaust apparatus includes: a first region; a second region connected to the first region; a third region connected to the first region; and a first gas line connected to the second region, wherein when gas is supplied to the first gas line, the first region does not communicate with the second region but communicates with the third region.