The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2019
Filed:
Oct. 01, 2016
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Hiromu Miyazawa, Azumino, JP;
Hiroshi Ito, Suwa, JP;
Tomoaki Nakamura, Chino, JP;
Masayoshi Yamada, Chino, JP;
Jiro Tsuruno, Okaya, JP;
Tsukasa Funasaka, Shiojiri, JP;
Assignee:
SEIKO EPSON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); H01L 41/047 (2006.01); B06B 1/06 (2006.01); A61B 8/00 (2006.01); G01N 29/24 (2006.01);
U.S. Cl.
CPC ...
B06B 1/0603 (2013.01); A61B 8/4444 (2013.01); A61B 8/4494 (2013.01); B06B 1/0622 (2013.01); G01N 29/2437 (2013.01);
Abstract
A piezoelectric element which includes a vibrating film, a piezoelectric body disposed on one surface of the vibrating film, and a horizontal electrode structure in which electrodes are disposed at a predetermined gap therebetween on the piezoelectric body. The vibrating film includes a recess portion in a portion corresponding to the predetermined gap in plan view.