The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 30, 2019

Filed:

Feb. 10, 2017
Applicant:

Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;

Inventors:

Takeshi Koiwasaki, Osaka, JP;

Hisao Nagai, Osaka, JP;

Takafumi Okuma, Osaka, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B01J 19/08 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
B01J 19/088 (2013.01); H01J 37/32055 (2013.01); H01J 37/32458 (2013.01); H01J 37/32825 (2013.01); B01J 2219/083 (2013.01); B01J 2219/0809 (2013.01); B01J 2219/0813 (2013.01); B01J 2219/0828 (2013.01); B01J 2219/0839 (2013.01); B01J 2219/0875 (2013.01); B01J 2219/0886 (2013.01); B01J 2219/0898 (2013.01); H01J 2237/339 (2013.01);
Abstract

A production apparatus for fine particles includes a vacuum chamber, a material feeding device connected to the vacuum chamber and feeding material particles from a material feeding port into the vacuum chamber, electrodes arranged in the vacuum chamber for generating plasma and a fine particle collection device connected to the vacuum chamber and collecting fine particles. The fine particles are produced from the material by generating electric discharge inside the vacuum chamber. The apparatus includes an inner chamber which forms an outside space with respect to the vacuum chamber installed between a wall of the vacuum chamber and a plasma generation region and gas supply pipes which supply a gas to the outside space between the wall of the vacuum chamber and a wall of the inner chamber.


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