The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2019
Filed:
Nov. 23, 2016
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Sayaka Yamasaki, Suwa, JP;
Hiroaki Tamura, Shimosuwa-machi, JP;
Assignee:
SEIKO EPSON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
A61B 8/00 (2006.01); A61B 8/14 (2006.01); H01L 41/09 (2006.01); H01L 41/113 (2006.01); H01L 41/312 (2013.01); H01L 41/338 (2013.01); A61B 8/08 (2006.01); B06B 1/06 (2006.01); H01L 41/08 (2006.01); H01L 41/31 (2013.01);
U.S. Cl.
CPC ...
A61B 8/4494 (2013.01); A61B 8/0891 (2013.01); A61B 8/14 (2013.01); A61B 8/4427 (2013.01); B06B 1/0629 (2013.01); H01L 41/081 (2013.01); H01L 41/09 (2013.01); H01L 41/094 (2013.01); H01L 41/0933 (2013.01); H01L 41/113 (2013.01); H01L 41/31 (2013.01); H01L 41/312 (2013.01); H01L 41/338 (2013.01); A61B 8/4444 (2013.01);
Abstract
A piezoelectric element, in which a piezoelectric body, and a vibrating plate having [111]-oriented single crystal silicon as a vibrating material are laminated is provided. In addition, a manufacturing method of a piezoelectric element including: cutting out a vibrating material to be used in the vibrating plate from a [111]-oriented single crystal silicon wafer; and laminating a piezoelectric body and the vibrating plate is provided.