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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10361111 B1

PDFFull Text
Date of Patent:
Jul. 23, 2019

Filed:

Feb. 05, 2018

Plasma processing apparatus and plasma processing method

Applicant:

Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;

Inventors:

Shogo Okita, Osaka, JP;

Takahiro Miyai, Tokyo, JP;

Assignee:

PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD., Osaka, JP;

Attorney:

Pearne & Gordon LLP

Primary Examiner:

Thanh Y Tran

Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/78 (2006.01); H01L 21/3065 (2006.01); H01L 21/66 (2006.01); H01J 37/00 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01J 37/00 (2013.01); H01J 37/3244 (2013.01); H01J 37/32715 (2013.01); H01J 37/32816 (2013.01); H01L 21/3065 (2013.01); H01L 21/67069 (2013.01); H01L 21/67109 (2013.01); H01L 21/67253 (2013.01); H01L 21/6831 (2013.01); H01L 21/6835 (2013.01); H01L 21/68735 (2013.01); H01L 21/68742 (2013.01); H01L 21/68785 (2013.01); H01L 21/78 (2013.01); H01L 22/20 (2013.01); H01J 2237/24585 (2013.01); H01J 2237/334 (2013.01); H01L 21/67092 (2013.01); H01L 2221/68327 (2013.01);
Abstract

Provided is a plasma processing apparatus which comprises a chamber, a stage configured to set a holding sheet and a substrate held thereon, a securing mechanism configured to secure the holding sheet on the stage, a plasma generator including a first electrode and a first high-frequency power supply, and a determiner for determining a contact status between the holding sheet and the stage, wherein a gas through-hole is arranged on a surface of the stage in an annular region defined between an inner edge of a frame set on the stage and an outer edge of the substrate, and wherein the determiner is configured to determine the contact status in accordance with a pressure of a gas in the gas introduction conduit and/or a regulation data for regulating the pressure of the gas, the gas being introduced between the stage and the holding sheet from the gas through-hole.

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