The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2019
Filed:
Nov. 03, 2014
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Jerome Hazart, Eybens, FR;
Johann Foucher, Voreppe, FR;
Abstract
A computer system processing heterogeneous measurements from various metrology apparatuses includes a processor, a storage, and a software platform. The storage includes a recording of direct models expressing the heterogeneous measurements as a function of predefined features of electronic devices or parameters for processing the measurements. The software platform includes a functional cost calculation module and an interface selecting one of plural cost functions. The functional module provides an estimation of a cost by comparison of the heterogeneous measurements with an estimation of the measurements obtained by an application of the direct models to values of predefined features or processing parameters. The software platform includes a functional solver module and an interface selecting one of plural solvers, for an iterative optimization by the solver of the values based on the output of the cost calculation module and by inversion of the direct models.