Magnetic bearing device and vacuum pump

Abstract

Provided is a magnetic bearing device which allows easy initial adjustment and allows optimal bearing control to be performed by a simple algorithm without increasing a memory capacity of a controller. A pair of square multipliers and an adder acquire respective steady-state current values of a pair of electromagnets which attract a rotor shaft of a magnetic bearing not shown in opposite radial directions, square the respective steady-state current values, and add up the respective squared steady-state current values. Then, to optimally change respective currents in the electromagnets in accordance with a mounting posture of the magnetic bearing, a correction coefficient arithmetic operator calculates a correction gain instruction value acting on the electromagnets from the steady-state current values squared/added up. Then, a gain instruction value obtained by adding the correction gain instruction value to a fundamental gain of a control circuit for the electromagnets is input to a gain amplifier. The gain amplifier generates a corrected current instruction value on the basis of the gain instruction value and optimally controls the magnetic bearing.