The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 23, 2019

Filed:

Oct. 16, 2014
Applicant:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Lamine Benaissa, Massy, FR;

Jean-Sebastien Moulet, Chambery, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B29C 61/00 (2006.01); H01L 41/113 (2006.01); B82B 3/00 (2006.01); B32B 3/28 (2006.01); B32B 3/30 (2006.01); C03B 23/02 (2006.01); G01L 1/16 (2006.01); B28B 17/00 (2006.01); H01L 21/302 (2006.01); H01L 21/3105 (2006.01); B29K 105/00 (2006.01);
U.S. Cl.
CPC ...
B29C 61/00 (2013.01); B28B 17/0009 (2013.01); B32B 3/28 (2013.01); B32B 3/30 (2013.01); B82B 3/0033 (2013.01); C03B 23/02 (2013.01); G01L 1/16 (2013.01); H01L 41/1132 (2013.01); B29K 2105/256 (2013.01); B32B 2250/02 (2013.01); B32B 2307/51 (2013.01); H01L 21/302 (2013.01); H01L 21/3105 (2013.01);
Abstract

A method for manufacturing a nanoscale object from a structure including a strained elastic layer on a foundation in a solid state present at a surface of a rigid substrate, the method reiterating: melting the foundation for a duration higher than or equal to 50 ns, thickness of the foundation being at least 20 nm and lower than a predetermined thickness corresponding to a theoretical peak-to-peak amplitude of wrinkles, the melting generating a simultaneous deformation of the elastic layer and of the foundation and a localized contact between the elastic layer and the rigid substrate insulating the regions from the foundation; solidifying the foundation to bring the foundation back to the solid state; until the foundation reaches yield point of the elastic layer.


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