The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2019
Filed:
Apr. 27, 2018
Applicant:
Volcano Corporation, San Diego, CA (US);
Inventors:
Cheryl Rice, San Diego, CA (US);
Dongjuan Chris Xi, San Marcos, CA (US);
Assignee:
VOLCANO CORPORATION, San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01); H01L 41/09 (2006.01); A61B 8/00 (2006.01); A61B 8/12 (2006.01); H01L 41/31 (2013.01); H01L 41/29 (2013.01); B06B 1/06 (2006.01); H01L 41/08 (2006.01); A61B 8/08 (2006.01);
U.S. Cl.
CPC ...
A61B 8/4483 (2013.01); A61B 8/12 (2013.01); B06B 1/0662 (2013.01); B06B 1/0688 (2013.01); H01L 41/047 (2013.01); H01L 41/0472 (2013.01); H01L 41/0477 (2013.01); H01L 41/0825 (2013.01); H01L 41/0973 (2013.01); H01L 41/29 (2013.01); H01L 41/31 (2013.01); A61B 8/0891 (2013.01); A61B 8/445 (2013.01); A61B 8/4461 (2013.01); H01L 41/098 (2013.01); Y10T 29/42 (2015.01); Y10T 29/49005 (2015.01); Y10T 29/49126 (2015.01); Y10T 29/49155 (2015.01);
Abstract
The present disclosure provides a method of fabricating an ultrasound transducer. A substrate having a first side and a second side opposite the first side is provided. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.