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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10356531 B1

PDFFull Text
Date of Patent:
Jul. 16, 2019

Filed:

Jun. 21, 2017

Piezoelectric mems sensor, such as force, pressure, deformation sensor or microphone, with improved sensitivity

Applicant:

Stmicroelectronics S.r.l., Agrate Brianza, IT;

Inventors:

Domenico Giusti, Monza, IT;

Sebastiano Conti, Pregnana Milanese, IT;

Assignee:

STMICROELECTRONICS S.R.L., Agrate Brianza, IT;

Attorney:

Seed IP Law Group LLP

Primary Examiner:

Joshua Kaufman

Int. Cl.
CPC ...
H04R 17/02 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); H01L 41/04 (2006.01); H01L 41/113 (2006.01); H01L 41/312 (2013.01); H04R 31/00 (2006.01); H04R 19/00 (2006.01); H04R 19/04 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
H04R 17/02 (2013.01); B81B 3/0037 (2013.01); B81C 1/00158 (2013.01); G01L 9/0042 (2013.01); G01L 9/0073 (2013.01); H01L 41/042 (2013.01); H01L 41/1132 (2013.01); H01L 41/1138 (2013.01); H01L 41/312 (2013.01); H04R 19/005 (2013.01); H04R 19/04 (2013.01); H04R 31/003 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/04 (2013.01); B81B 2207/012 (2013.01); H04R 2201/003 (2013.01);
Abstract

A MEMS sensor, in particular a microphone, of a piezoelectric type, formed in a membrane of semiconductor material accommodating a compliant portion, which extends from a first surface to a second surface of the membrane. The compliant portion has a Young's modulus lower than the rest of the membrane. A sensitive region having piezoelectric material extends on the first surface, over the compliant portion and is fixed at its ends to the membrane on opposite sides of the compliant portion. A third area of the membrane, arranged between the compliant portion and the second surface, forms a hinge element.

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