The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2019

Filed:

Dec. 14, 2016
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Tomohiro Sakai, Matsumoto, JP;

Kazuya Kitada, Suwa, JP;

Koji Sumi, Shiojiri, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/27 (2013.01); B41J 2/14 (2006.01); H01L 41/047 (2006.01); H01L 41/083 (2006.01); H01L 41/187 (2006.01); B41J 2/16 (2006.01); H01L 41/08 (2006.01); H01L 41/318 (2013.01);
U.S. Cl.
CPC ...
H01L 41/27 (2013.01); B41J 2/14233 (2013.01); B41J 2/14274 (2013.01); B41J 2/161 (2013.01); B41J 2/1623 (2013.01); B41J 2/1628 (2013.01); B41J 2/1629 (2013.01); B41J 2/1635 (2013.01); B41J 2/1646 (2013.01); H01L 41/0472 (2013.01); H01L 41/083 (2013.01); H01L 41/0805 (2013.01); H01L 41/1873 (2013.01); H01L 41/318 (2013.01); B41J 2002/14241 (2013.01); B41J 2002/14258 (2013.01); B41J 2002/14419 (2013.01); B41J 2202/03 (2013.01);
Abstract

A piezoelectric element includes a first electrode, a piezoelectric layer formed of a first piezoelectric film which is formed on the first electrode and which includes potassium, sodium, and niobium and a plurality of second piezoelectric films which are formed on the first piezoelectric film and which include potassium, sodium, and niobium, and a second electrode formed on the piezoelectric layer, in which the piezoelectric layer is a stack of a plurality of piezoelectric films, the first piezoelectric film has a thickness of 30 nm to 70 nm, a concentration of sodium in each of the piezoelectric films is along a gradient in the film thickness direction with the first electrode side being high and the second electrode side being low.


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