The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2019
Filed:
Jan. 20, 2017
Screen Holdings Co., Ltd., Kyoto, JP;
SCREEN Holdings Co., Ltd., Kyoto, JP;
Abstract
A semiconductor wafer held by a holder within a chamber is irradiated and heated with halogen light emitted from multiple halogen lamps. Cylindrical outer and inner louvers made of opaque quartz are provided between the halogen lamps and the semiconductor wafer. A reflector is provided in an area of tube walls of the halogen lamps that faces the spacing between the inner wall surface of the outer louver and the outer wall surface of the inner louver. The spacing between the two louvers is located immediately below and faces the peripheral portion of the semiconductor wafer. Thus, the illuminance of light that reaches the peripheral portion of the semiconductor wafer where a temperature drop is likely to occur will be higher than the illuminance of light that travels toward the central portion from the halogen lamps. This configuration will help make uniform the in-plane temperature distribution of the semiconductor wafer.