The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2019
Filed:
Jul. 27, 2015
Applicant:
Graphenea, S.a., San Sebastian, ES;
Inventors:
Amaia Zurutuza Elorza, Gipuzkoa, ES;
Alba Centeno Perez, Gipuzkoa, ES;
Beatriz Alonso Rodriguez, Gipuzkoa, ES;
Amaia Pesquera Rodriguez, Bizkaia, ES;
Jesus De La Fuente Cosio, Araba, ES;
Assignee:
GRAPHENEA, S.A., San Sebastian, ES;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/67 (2006.01); H01L 21/04 (2006.01); C23C 16/01 (2006.01); C23C 16/26 (2006.01); C01B 32/194 (2017.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02527 (2013.01); C01B 32/194 (2017.08); C23C 16/01 (2013.01); C23C 16/26 (2013.01); H01L 21/02118 (2013.01); H01L 21/6708 (2013.01); H01L 21/67253 (2013.01); H01L 21/02491 (2013.01); H01L 21/02664 (2013.01); H01L 29/1606 (2013.01);
Abstract
Equipment to automatically transfer a graphene monolayer deposited on a metal layer and protected with a polymer layer to a substrate, comprising at least one liquid inlet, at least one sensor to control the level and pH of the liquids, at least one liquid outlet to drain the liquids, a stirring element to homogenise the liquid mixture and a ramp to feed in the substrate and method to automatically transfer a graphene monolayer to a substrate, which uses said equipment.