The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2019

Filed:

May. 11, 2016
Applicant:

Osram Opto Semiconductors Gmbh, Regensburg, DE;

Inventors:

Joachim Hertkorn, Wörth an der Donau, DE;

Lorenzo Zini, Regensburg, DE;

Alexander Frey, Lappersdorf, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04L 21/02 (2006.01); C30B 25/04 (2006.01); H01L 21/02 (2006.01); C30B 29/40 (2006.01); C30B 25/18 (2006.01); C30B 33/10 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02458 (2013.01); C30B 25/04 (2013.01); C30B 25/18 (2013.01); C30B 29/403 (2013.01); C30B 33/10 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 21/02639 (2013.01); H01L 21/02647 (2013.01);
Abstract

A method for procuring a nitride compound semiconductor device is disclosed. In an embodiment the method includes growing a first nitride compound semiconductor layer onto a growth substrate, depositing a masking layer, growing a second nitride compound semiconductor layer onto the masking layer, growing a third nitride compound semiconductor layer onto the second nitride compound semiconductor layer such that the third nitride compound semiconductor layer has non-planar structures and growing a fourth nitride compound semiconductor layer onto the non-planar structures such that the fourth nitride compound semiconductor layer has an essentially planar surface. The method further includes growing a functional layer sequence of the nitride compound semiconductor device, connecting a side of the functional layer sequence located opposite to the growth substrate to a carrier and removing the growth substrate.


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