The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2019

Filed:

Nov. 18, 2016
Applicant:

Trumpf Huettinger Gmbh + Co. KG, Freiburg, DE;

Inventor:

Christian Bock, Freiburg, DE;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 7/40 (2006.01); H05H 1/46 (2006.01); G05B 11/06 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32183 (2013.01); G05B 11/06 (2013.01); H03H 7/40 (2013.01); H05H 1/46 (2013.01);
Abstract

Techniques are described for controlling the power and/or matching the impedance of the output impedance of a high frequency power generator to the impedance of a load, in particular a plasma discharge. A control arrangement may include a control unit, to which a target value, an actual value, and a correction value is supplied, the control unit being set up to generate an adjustment value by taking into account the correction value. The control arrangement may also include a device for determining the correction value, to which a control value is supplied and which is set up to determine the correction value by taking into account the control value and a default value. In some embodiments, when the control value deviates from the default value, the correction value influences the control unit such that the actual value deviates from the target value in the adjusted state of the control unit.


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