The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2019
Filed:
May. 23, 2017
Canon Kabushiki Kaisha, Tokyo, JP;
Kazushi Mizumoto, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides a method of forming a first layer including a layout of first shot regions each having a first size and a second layer including a layout of second shot regions each having a second size corresponding to a size including at least two first shot regions to be overlaid on each other, by first processing of forming the first layer in a process including scanning exposure and second processing of forming the second layer, the method including determining, for each of the first shot regions, a scanning direction when performing scanning exposure for the first shot region in the first processing so that combinations each including the scanning directions and the at least two first shot regions included in the second shot region in the first processing are identical in at least some of the second shot regions.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile