The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2019

Filed:

Dec. 19, 2017
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Qing Cao, Westchester, NY (US);

Jianshi Tang, Elmsford, NY (US);

Ning Li, White Plains, NY (US);

Ying He, Yorktown Heights, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/07 (2006.01); G01N 33/543 (2006.01); H01L 41/187 (2006.01); H01L 41/23 (2013.01); H01L 41/314 (2013.01); H01L 41/29 (2013.01); H01L 41/18 (2006.01);
U.S. Cl.
CPC ...
G01N 27/07 (2013.01); G01N 33/5438 (2013.01); H01L 41/18 (2013.01); H01L 41/1875 (2013.01); H01L 41/23 (2013.01); H01L 41/29 (2013.01); H01L 41/314 (2013.01);
Abstract

Chemical sensors and methods of using and making the same include a functionalized electrode configured to change surface potential in the presence of an analyte. A piezoelectric element is connected to the functionalized electrode and is configured to change in volume in accordance with the surface potential of the functionalized electrode. A piezoresistive element is in contact with the piezoelectric element and is configured to change in resistance in accordance with the volume of the piezoelectric element.


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