The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2019

Filed:

Mar. 09, 2015
Applicant:

Azbil Corporation, Chiyoda-ku, JP;

Inventor:

Tomohisa Tokuda, Chiyoda-ku, JP;

Assignee:

AZBIL CORPORATION, Chiyoda-ku, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 13/02 (2006.01); G01L 9/00 (2006.01); G01L 19/06 (2006.01);
U.S. Cl.
CPC ...
G01L 13/025 (2013.01); G01L 9/0052 (2013.01); G01L 9/0054 (2013.01); G01L 9/0073 (2013.01); G01L 13/02 (2013.01); G01L 19/0618 (2013.01);
Abstract

A pressure sensor chip according to the present invention includes an annular diaphragm that surrounds a periphery of a low-differential-pressure diaphragm () as a high-differential-pressure diaphragm (). A measurement pressure (Pa) for one surface of the low-differential-pressure diaphragm () is transmitted to one surface of the high-differential-pressure diaphragm () along a branched path, and a measurement pressure (Pb) for the other surface of the low-differential-pressure diaphragm () is transmitted to the other surface of the high-differential-pressure diaphragm () along a branched path. Thus, multiple differential-pressure measurement ranges can be provided.


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