The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2019
Filed:
Mar. 09, 2015
Azbil Corporation, Chiyoda-ku, JP;
Tomohisa Tokuda, Chiyoda-ku, JP;
AZBIL CORPORATION, Chiyoda-ku, JP;
Abstract
A pressure sensor chip according to the present invention includes two static-pressure diaphragms () formed by dividing an annular diaphragm arranged so as to surround a differential-pressure diaphragm (). A reference pressure is applied to one surface of one static-pressure diaphragm (), and a measurement pressure (Pa) for one surface of the differential-pressure diaphragm () is transmitted to the other surface of the static-pressure diaphragm () along a branched path. A reference pressure is applied to one surface of the other static-pressure diaphragm (), and a measurement pressure (Pb) for the other surface of the differential-pressure diaphragm () is transmitted to the other surface of the static-pressure diaphragm () along a branched path. Accordingly, multiple differential-pressure measurement ranges can be provided.