The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2019

Filed:

May. 19, 2016
Applicant:

National Cheng Kung University, Tainan, TW;

Inventors:

Yonhua Tzeng, Tainan, TW;

Chih-Chun Chang, Tainan, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/27 (2006.01); H01L 21/02 (2006.01); H01L 21/48 (2006.01);
U.S. Cl.
CPC ...
C23C 16/27 (2013.01); H01L 21/0262 (2013.01); H01L 21/02381 (2013.01); H01L 21/02422 (2013.01); H01L 21/02444 (2013.01); H01L 21/02527 (2013.01); H01L 21/4803 (2013.01); H01L 21/02491 (2013.01);
Abstract

The present invention relates to a method of diamond nucleation, comprising the following steps: providing a substrate and forming a graphene layer on a surface of the substrate; providing a reaction chamber and disposing the substrate in the reaction chamber; providing a gas mixture in the reaction chamber, wherein the gas mixture includes a carbon-containing gas; and forming a plasma in the reaction chamber to cause the carbon-containing gas to react and form a plurality of diamond nuclei on a surface of the graphene layer. The present invention also relates to a structure formed by the aforesaid method, comprising: a substrate; a graphene layer disposed on the substrate; and a plurality of diamond particles formed on the graphene layer.


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