The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2019

Filed:

Apr. 08, 2015
Applicant:

The Japan Steel Works, Ltd., Shinagawa-ku, Tokyo, JP;

Inventors:

Yasuhiro Yamashita, Kanagawa, JP;

Ryosuke Sato, Kanagawa, JP;

Toshio Inami, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/00 (2014.01); B23K 26/402 (2014.01); B23K 26/082 (2014.01); B23K 26/073 (2006.01); B23K 26/50 (2014.01); B23K 26/08 (2014.01); B23K 26/0622 (2014.01); B23K 26/53 (2014.01); H01L 51/00 (2006.01); B23K 103/00 (2006.01); B23K 103/16 (2006.01);
U.S. Cl.
CPC ...
B23K 26/50 (2015.10); B23K 26/0006 (2013.01); B23K 26/0622 (2015.10); B23K 26/0732 (2013.01); B23K 26/082 (2015.10); B23K 26/0853 (2013.01); B23K 26/402 (2013.01); B23K 26/53 (2015.10); B23K 2103/172 (2018.08); B23K 2103/42 (2018.08); B23K 2103/54 (2018.08); H01L 51/003 (2013.01);
Abstract

A laser irradiation method sets scan lines in an x direction in parallel, and in a y direction to be separate by an inter-scan-line distance Py corresponding to laser irradiation areas of a processing target object, orients a length direction of a linear laser spot with length Wy and width Wx in the y direction, and irradiates target object with the laser spot in each of irradiation positions arranged at width direction intervals Λ while moving the laser spot relative to the target object along the scan lines. The method includes determining the inter-scan-line distance Py, the width direction interval Λ, and a position shift quantity Δx (where, 0<Δx<Λ) so that the irradiation positions on adjacent scan lines are shifted in the x direction by the position shift quantity Δx and a cumulative value of the applied laser intensity is substantially equalized.


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