The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2019
Filed:
Feb. 26, 2016
Applicant:
Toshiba Memory Corporation, Minato-ku, JP;
Inventor:
Tomoyuki Takeishi, Yokkaichi, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/12 (2006.01); B05B 12/16 (2018.01); B05D 1/00 (2006.01); B05D 1/02 (2006.01); H01L 21/67 (2006.01); G03F 7/16 (2006.01);
U.S. Cl.
CPC ...
B05B 12/16 (2018.02); B05D 1/005 (2013.01); B05D 1/02 (2013.01); G03F 7/162 (2013.01); H01L 21/6715 (2013.01);
Abstract
According to one embodiment, provided is a coating apparatus. The coating apparatus includes a first discharger, a second discharger, and a third discharger. The first discharger discharges a first liquid on a top surface of a substrate. In addition, the second discharger discharges a second liquid of which surface tension is higher than surface tension of the first liquid on the top surface of the substrate. In addition, the third discharger is disposed in a side outer than the first discharger in the substrate and discharges a gas on the top surface of the substrate.